http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017084895-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 |
| filingDate | 2015-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae15df36fc8d67cc5c5677b3e4ab09d8 |
| publicationDate | 2017-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017084895-A |
| titleOfInvention | Inspection method of silicon wafer |
| abstract | An oxygen precipitation defect region of a wafer is easily identified with high accuracy without performing selective etching, and is inspected by a method safe for the environment and the human body. After measuring the oxygen precipitate density of a plurality of heat-treated reference samples by IR tomography, the sample surface is contaminated with Cu, and the sample is heated to a first temperature exceeding 300 ° C. at which no Cu silicide is formed in the sample. The temperature is raised and Cu is thermally diffused into the sample. The sample is maintained at a second temperature exceeding 300 ° C. that is the same as or different from the first temperature, Cu is precipitated in the sample, and excess Cu is diffused to the sample surface and cooled. After etching the sample surface, the recombination lifetime of the sample Cu is measured, and a calibration curve is created from this lifetime and the oxygen precipitation density. The inspection sample is processed in the same manner as the reference sample, and the Cu recombination lifetime of the inspection sample is measured. This measurement result is collated with the calibration curve to estimate the oxygen precipitate density of the test sample. [Selection] Figure 2 |
| priorityDate | 2015-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.