http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017083540-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd7a3f69ad120ab203d9c8a923c6c38e |
| publicationDate | 2017-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017083540-A |
| titleOfInvention | Photosensitive resin composition for forming interlayer insulating film, interlayer insulating film, device, and method for forming interlayer insulating film |
| abstract | Provided are a photosensitive resin composition for forming an interlayer insulating film, an interlayer insulating film, and a method for forming the interlayer insulating film. An alkali-soluble resin (A), a photosensitizer (B), and a resin (Z) having a structural unit (z1) represented by the following general formula (z-1) (provided that the alkali-soluble resin (A) )), And a photosensitive resin composition for forming an interlayer insulating film [in the general formula, R represents a hydrogen atom or a methyl group, and Vz01 represents a divalent linkage containing a group derived from alkylene glycol. Rz01 represents a hydrogen atom or a hydrocarbon group. O represents an oxygen atom, Lz01 represents an alkylene group which may have a hydroxy group as a substituent, and p represents an integer of 1 to 10. ] [Chemical 1] [Selection figure] None |
| priorityDate | 2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 444.