http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017073505-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9a255559e1d94f20510a17a673b1078 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-331 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 |
| filingDate | 2015-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34acd95173c8b8b9e3f5fad7e5959bbd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_113b74e094d96abaa12f22a5a47dcd68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c146afaf8110e3e24d3def1ab13811d7 |
| publicationDate | 2017-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017073505-A |
| titleOfInvention | Electromechanical conversion film manufacturing apparatus, electromechanical conversion film manufacturing method, electromechanical conversion element manufacturing method, liquid discharge head manufacturing method, and liquid discharge apparatus manufacturing method |
| abstract | An electromechanical conversion film manufacturing apparatus capable of forming an electromechanical conversion film with sufficiently secured crystal orientation. An electromechanical conversion film manufacturing apparatus formed by a sol-gel method includes a liquid chamber 224 that contains a precursor sol-gel liquid containing a metal component for forming an electromechanical conversion film, and a precursor in the liquid chamber. A first sol-gel liquid that is discharged into the liquid chamber of the droplet discharge head 220, and a first precursor sol-gel liquid that can be supplied to the liquid chamber of the droplet discharge head 220. A solution tank 231, a solution pump 232, a solution flow rate adjustment valve 233, which are supply means, and a second precursor sol-gel solution containing a metal component having the same component and a different composition ratio as the first precursor sol-gel solution, A solution tank 234, a solution pump 235, and a solution flow rate adjustment valve 236, which are second supply means that can be supplied independently from the supply means, are provided. [Selection] Figure 1 |
| priorityDate | 2015-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.