http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017067702-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f1192a135e4bc40a5f201a9646f20172 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73ac7f93c1db70c01541f42fdabf215b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a86e51d369da4e7f544d8bee02052ac http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04bbc10c7700d9e05d46b13fff3d1887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95ac298908e54a65a4d6ce1b79e5f97a |
| publicationDate | 2017-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017067702-A |
| titleOfInvention | Film thickness inspection apparatus and film thickness inspection method |
| abstract | Provided are a film thickness inspection apparatus and a film thickness inspection method capable of stably measuring a color of a thin film and stably evaluating the film thickness of the thin film. A film thickness inspection apparatus 200 according to the present invention includes a color measurement unit 240 that measures a predetermined area of a thin film formed on a substrate 310, an inclination measurement unit 210 that measures an inclination of the predetermined area, and a measurement. The relative inclination between the colorimetric unit 240 and the substrate 310 is adjusted according to the inclination of the predetermined region measured by the inclination measuring unit 210 so that the color part 240 has a predetermined inclination angle with respect to the predetermined region. Evaluation that evaluates the film thickness of the predetermined region of the thin film based on the colorimetric value obtained by measuring the color of the predetermined region by the adjusting unit 250 that adjusts the relative inclination by the adjusting unit 250 Part. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113048896-A |
| priorityDate | 2015-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.