http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017059658-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9eaddfae7c121273d664d82a8bff8d1 |
| publicationDate | 2017-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017059658-A |
| titleOfInvention | Epitaxial wafer deposition condition determination method, and epitaxial wafer manufacturing method and manufacturing apparatus |
| abstract | Provided is an epitaxial wafer manufacturing method capable of forming an epitaxial film in consideration of factors other than the film thickness in-plane distribution while keeping the variation in the film thickness in-plane distribution within an allowable range. A method of measuring the thickness of an epitaxial film formed on a wafer and calculating a film thickness in-plane distribution index, which is an index of film thickness variation based on this value, and M (M is 2). For each of all combinations in which 1 to M control factors are selected from the control factors of the above integers), the operation amount of each control factor is optimized so that the film thickness in-plane distribution index is minimized, and the minimum Out of all combinations of the control factors and the process of calculating the predicted value of the in-plane thickness distribution index to be converted, and the predicted value of the in-plane thickness distribution index is within the allowable range, Selecting one of the combinations of control factors based on factors other than. While the dispersion of the in-plane thickness distribution is within an allowable range, other quality is also increased. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018182211-A |
| priorityDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.