http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017058557-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2015-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbfd9cb9263d71c70ae39b04a3d9d958 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b38071f4d61864adc986dfc999f2fa11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f2053be723a5329e3d7a9c3d3aa07f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cc6a93a1a7e31eb220ea1b02839c886 |
| publicationDate | 2017-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017058557-A |
| titleOfInvention | Negative resist composition, method for producing resist pattern, and electronic component |
| abstract | A negative resist composition with improved dimensional fidelity and resist residue control is provided. [MEANS FOR SOLVING PROBLEMS] A phenolic compound (A), an acid generator (B), one or more phenolic hydroxyl groups in one molecule, and a hydroxymethyl group and an alkoxymethyl group on an aromatic ring having a phenolic hydroxyl group. A basic nitrogen-containing compound (C) having a molecular weight of 400 to 3,000 having one or more substituents selected from the group consisting of one or more in one molecule, and a crosslinkable compound (D), the phenol A negative resist composition in which the functional compound (A) and the crosslinkable compound (D) may be the same compound. [Selection figure] None |
| priorityDate | 2015-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.