http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017049433-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34c067d1bbfe85ac23d961d454a35d0e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2015-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d7e8b2f9317e5ebb39e88207e6f8925 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5e810d9f13dfc6756ddc2e1396a2324 |
| publicationDate | 2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017049433-A |
| titleOfInvention | Insulating film forming method, electronic substrate manufacturing method, and photosensitive resin composition |
| abstract | The present invention provides a method for forming an insulating film capable of adjusting the cross-sectional shape of the opening end of the insulating film when the insulating film is formed using a photosensitive resin composition. An insulating film forming method of the present invention includes a coating process for forming a coating film, an exposure process, and a developing process, and a haze value at 385 nm of the coating film and an opening edge in the insulating film. The cross-sectional shape satisfies the following conditions (a) and (c). Condition (a): The haze value is 25% or less, and the cross-sectional shape of the opening end is rectangular. Condition (b): The haze value is more than 25% and 80% or less, the cross-sectional shape of the opening end is tapered, and the taper angle in the cross-sectional shape is 60 ° or more and 85 ° or less. Condition (c): The haze value is more than 80%, the sectional shape of the opening end is tapered, and the taper angle in the sectional shape is 0 ° or more and less than 60 °. [Selection figure] None |
| priorityDate | 2015-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 96.