http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017048462-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6038f17109882ad88e9ba8ea907ebb45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2019deb804b9446e634283d72ec3a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a37361f6bc44a91e67d040d34cb3b2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fc56d45855925b75afa3dbd744d8920 |
| publicationDate | 2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017048462-A |
| titleOfInvention | Etching solution, replenisher, and method for forming copper wiring |
| abstract | An etching solution that can suppress side etching without reducing the linearity of copper wiring (wiring width (W2) at the top of the copper wiring) and suppress variation in wiring width (W1) at the bottom of the copper wiring, and its etching solution A replenisher and a method for forming a copper wiring are provided. The copper etching solution of the present invention comprises an acid and one or more compounds selected from the group consisting of aliphatic acyclic compounds, aliphatic heterocyclic compounds, and heteroaromatic compounds, The aliphatic acyclic compound is a saturated aliphatic acyclic compound (A) having 2 to 10 carbon atoms having at least two nitrogen atoms as a hetero atom, and the aliphatic heterocyclic compound has a ring. A compound (B) containing a 5- to 7-membered ring having one or more nitrogen atoms as constituting heteroatoms, wherein the heteroaromatic compound is a heteroaromatic 6-membered ring having one or more nitrogen atoms as heteroatoms constituting the ring Is a compound (C) containing [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108934126-A |
| priorityDate | 2016-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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