| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc45703f67bc72a6db582867886fd5d5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01M10-0562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B25-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01M10-0562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2015-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5e64face0668bdd5110ac3937600f95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a9b5868fc5b564933b0cabe81f2e4da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_277740ae80d824c69344afe6bcd5149b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecbc2bd33d670b3d4692fa501b7c9afa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc59216a837c70c2ec37639f03847804 |
| publicationDate |
2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017048445-A |
| titleOfInvention |
Method for producing lithium phosphate oxynitride layer |
| abstract |
An object of the present invention is to provide a method for producing a lithium phosphate oxynitride layer having high ionic conductivity. The method of the present invention for producing a lithium phosphate oxynitride layer on a substrate by atomic layer deposition involves the use of an atmosphere surrounding the substrate as a first precursor, such as a dialkyl phosphoramidate. An atmosphere that alternately switches between a first atmosphere containing an alkyl phosphorodiamidate and a second atmosphere containing a second precursor, eg, lithium hexaalkyldisilazide Includes change process. [Selection] Figure 1 |
| priorityDate |
2015-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |