http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017040914-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2016-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_184450042931f3bf654eccf2fadba83a |
| publicationDate | 2017-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017040914-A |
| titleOfInvention | Resist composition |
| abstract | An object of the present invention is to provide a compound, a resin, and a resist composition capable of producing a resist pattern with good CD uniformity (CDU). A resist composition containing a resin having a structural unit represented by formula (I) and an acid generator, a compound that derives a structural unit represented by formula (I), and a resin containing the same. [In formula (I), R1 represents an alkyl group, a hydrogen atom or a halogen atom which may have a halogen atom. L1 represents a divalent hydrocarbon group which may have a substituent or * -L2-X1-L3-. * Represents a bond with an oxygen atom. L2 represents a divalent hydrocarbon group which may have a substituent. L3 represents a divalent hydrocarbon group which may have a single bond or a substituent. X1 represents an oxygen atom, a carbonyloxy group or an oxycarbonyl group. R2 represents a hydrocarbon group which may have a substituent. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7288814-B2 |
| priorityDate | 2015-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 268.