http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017034782-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-00 |
filingDate | 2015-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7411c2fec5189048f131cdc713ef888e |
publicationDate | 2017-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2017034782-A |
titleOfInvention | Piezoelectric drive device, robot, pump, and method of manufacturing piezoelectric drive device |
abstract | An object of the present invention is to provide a piezoelectric driving device in which a portion in contact with a driven body has high bonding strength with respect to a diaphragm, and a method for manufacturing such a piezoelectric driving device. A piezoelectric driving device according to the present invention includes a piezoelectric element including a piezoelectric body, and a plate-shaped diaphragm 30 on which the piezoelectric element is disposed. The vibration plate 30 includes a portion that contacts the driven body, and includes a first region 20a that includes a sintered body of the first metal oxide, and a sintered body of the second metal oxide that is different from the first metal oxide. A second region 30a including the second region 30a, and a joint portion 30b provided between the first region 20a and the second region 30a and including a solid solution of the first metal oxide and the second metal oxide. [Selection] Figure 2 |
priorityDate | 2015-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 94.