http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017028868-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7af673589ca45d2fd8b9ea902cdbd1dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_733f9f206a30eb241a0e7ece400747f1 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N1-08 |
filingDate | 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b49db16c91163eb2c208d76799794918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05210a77fee7b5dcf68fd1d991b3359 |
publicationDate | 2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2017028868-A |
titleOfInvention | Semiconductor device, manufacturing method thereof, and power generation system |
abstract | In a semiconductor device used for power generation by an electret, a semiconductor device having longer-term charge stability is provided. The semiconductor device includes an electret film and generates electric power due to electric charges held in the electret film. The electret film includes a first dielectric layer, a second dielectric layer stacked on the first dielectric layer, and a first dielectric layer so as to cover at least the outer peripheral edge of the interface between the first dielectric layer and the second dielectric layer. A third dielectric layer disposed on the first dielectric layer, and the third dielectric layer is formed of the same constituent material as the first dielectric layer. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109149999-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109149999-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10666166-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020184615-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7298837-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020148217-A |
priorityDate | 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.