| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67739
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-4427
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bdeba161a810bdde0b0cc297a17746f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d216c1c10d6d8ee1bb77bd898cf8f08b |
| publicationDate |
2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017017154-A |
| titleOfInvention |
Substrate transport apparatus and substrate transport method |
| abstract |
An object of the present invention is to improve the atmosphere of a substrate transfer device. There is provided a substrate transfer apparatus having a transfer chamber for transferring a substrate and a processing chamber for processing the substrate, the transfer chamber having a contamination monitor for detecting a contamination state of the transfer chamber. . [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180134300-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023139937-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11791195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019161169-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462444-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220065701-A |
| priorityDate |
2015-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |