http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017010996-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-149 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1362 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate | 2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a57b0cc94cb5b78fd17a1d3154c5bf6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0404f734ae876eb23bfedabca2abc0c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fdcc1e651c62e5856b1347e39dc8f16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4d090e622535a3194c657ff8456c66e |
| publicationDate | 2017-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2017010996-A |
| titleOfInvention | Etching composition and method for producing conductive film |
| abstract | An etching composition capable of suppressing corrosion of copper or the like on a substrate surface, and a method for producing a conductive film using the etching composition. An etching composition containing an oxidizing agent, water, and a corrosion inhibitor represented by the following general formula (1a). (In the formula, each R independently represents a hydrogen atom or a monovalent organic group, R 2 represents an aromatic group which may have a substituent, and R 4 each independently represents a halogen atom, a hydroxyl group or a mercapto group. Represents a sulfide group, a silyl group, a silanol group, a nitro group, a nitroso group, a sulfonate group, a phosphino group, a phosphinyl group, a phosphonate group, or an organic group, and n represents an integer of 0 to 3. The above R represents the other R. Or it may combine with R 2 to form a cyclic structure.) [Selection figure] None |
| priorityDate | 2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.