| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
2015-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e902b51c88ac11146526d746e1d6243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3edf47e6f203de08437570f7a1dc8a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_394812ba71e3d203637515ba562d459a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ddaa3eb1b630a44776d3b97849f9f0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6b913baa6908b7894a2251813c895f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06da3b9d53c49be08cb1beba1f43a26d |
| publicationDate |
2017-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017001218-A |
| titleOfInvention |
Method for water repellent treatment of member surface |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for satisfactorily water-repellent treatment of a surface of a member while increasing the patterning accuracy of the member by photolithography. A method for water repellent treatment of a surface of a member, the step of forming a member having a material layer by applying a material containing a compound having a fluorine atom to the surface of a photosensitive resin layer, and exposing the member A first exposure step of exposing the member to form a latent image on the member; a developing step of developing the member on which the latent image is formed; and a second exposure step of exposing the member to the exposure device after the developing step. And a water repellent treatment method for the surface of the member. [Selection] Figure 5 |
| priorityDate |
2015-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |