| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2201-54 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F226-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D139-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016526183-A |
| titleOfInvention |
Composition comprising polymeric thermal acid generator and method thereof |
| abstract |
The present invention relates to a novel aqueous composition comprising a polymeric thermal acid generator, and the novel composition is coated on a photoresist pattern to form a polymeric thermal acid generator layer on the photoresist pattern. Regarding the method. The polymer-type thermal acid generator includes a polymer having at least one repeating unit of structure 2. Wherein R 1 -R 5 are independently selected from the group consisting of H and C 1 -C 6 alkyl; R 6 is unsubstituted aryl, substituted aryl, alkyl (C 1 -C 8 ) and fluoroalkyl (C 1 -C 8 ), and W is a C 2 -C 6 alkylene spacer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018131495-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019114792-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018025696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7340331-B2 |
| priorityDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |