http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016526100-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16 |
| filingDate | 2014-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016526100-A |
| titleOfInvention | Method for depositing tungsten-containing film using tungsten compound and precursor composition for depositing tungsten-containing film containing the tungsten compound |
| abstract | The present invention relates to a tungsten-containing film deposition method using a tungsten compound and a tungsten-containing film deposition precursor composition containing the tungsten compound. |
| priorityDate | 2013-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.