| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00523
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-1462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-361 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 |
| filingDate |
2014-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016515163-A |
| titleOfInvention |
Laser induced gas plasma processing |
| abstract |
Techniques are provided for removing material from a substrate. The laser beam is focused at a distance from the surface to be treated. Gas is supplied to the focal point. The gas is dissociated using laser energy to generate a gas plasma. The substrate can then be brought into contact with the gas plasma to allow material removal. [Selection] Figure 1 |
| priorityDate |
2013-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |