| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66803 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-00 |
| filingDate |
2013-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016514359-A |
| titleOfInvention |
Solution formulation and method for forming a substrate comprising an arsenic dopant |
| abstract |
The formulation and method of the solution for forming the substrate containing the dopant is described. In certain embodiments, the dopant can include arsenic (As). In one aspect, a dopant solution comprising a solvent and a dopant is provided. In certain embodiments, the dopant solution may have a flash point that is at least approximately equal to the lowest temperature at which atoms at the surface of the substrate can bind to the arsenic-containing compound of the dopant solution. In one embodiment, a plurality of silicon atoms on the surface of the substrate are covalently bonded to the arsenic-containing compound. [Selection] Figure 5 |
| priorityDate |
2012-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |