http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016500202-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2013-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016500202-A |
| titleOfInvention | Method for removing material from a substrate |
| abstract | For example, a method for removing material from a substrate such as an electronic device is described. In one embodiment, the method may include providing a substrate that includes a first side and a second side, the material being disposed on at least a portion of the first side. The method also includes contacting the substrate and the solution so that the first side of the substrate is coated with the solution, at least a portion of the second side is free of the solution, and at least a portion of the material is the first of the substrate. A step of allowing release from the side may also be included. Further, the method may include flushing the substrate to remove at least a portion of the material released from the first side of the substrate. The method may be suitable for removing positive and negative photoresists and in some cases completely dissolving them. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019516130-A |
| priorityDate | 2012-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 125.