http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016224281-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cebc9740ef706cde29e885504f274ffa |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F6-06 |
| filingDate | 2015-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99acb4b074094251f50ea6452c55f441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59cc1ba337e9577cf196b8e0aa546cf7 |
| publicationDate | 2016-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016224281-A |
| titleOfInvention | Lithographic material manufacturing method, lithography composition manufacturing method, and pattern-formed substrate manufacturing method |
| abstract | In a lithography material in which a polymer for lithography is accommodated in a container for storage, transportation, etc., metal impurities in the polymer for lithography are highly reduced while suppressing the burden of introducing equipment. A lithographic polymer or a polymer solution is filled in a container and hermetically sealed, and the filling step is performed in a protective space, the gas in the protective space, and the lithographic polymer. Alternatively, a method for producing a lithographic material in which a polymer solution is contained in a container, wherein a gas that has passed through a filter is supplied to the protective space, and a differential pressure before and after passing through the filter is reduced to 60. A method for producing a lithography material, which is maintained at ˜220 Pa. [Selection figure] None |
| priorityDate | 2015-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.