http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016217919-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_08e6a8275b9bba91f51e39fa8b95ffe0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f901c4ff3309767f1e36d2706f73db70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d9651d80cff78d9bf6b64f90192c165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f6d08cdfe142ca662662b10c4a3b7db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64db3875d68b64cec7fcc96bf0054bfb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec265ab14b7f49c615c9d3bd0db194fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02b36841b37453712920102bdf52aa55 |
| publicationDate | 2016-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016217919-A |
| titleOfInvention | probe |
| abstract | Provided is a probe that has a simple configuration and hardly causes adhesion of Al to the tip of the probe, has low contact resistance, and can be used for a long period of time. SOLUTION: A core material 2 made of any one of W, ReW, BeCu, Al, carbon tool steel and resin, a buffer metal layer 3 covering the core material 2, Ir covering the buffer metal layer 3, Contact resistance when a probe including a coating layer 4 made of any one of Ni, Ru, and Rh is contacted with an electrode made of Al with a probe tip having a diameter of 15 μm and the number of contacts is repeated at least 80,000 times Becomes 1Ω or less. An adhesion layer may be disposed between the core material 2 and the buffer metal layer 3. It is preferable that peeling of the coating layer 4 does not occur when the number of contacts between the probe 1 and the electrode made of Al is repeated at least 80,000 times. The overdrive amount of the probe 1 in contact between the probe 1 and the electrode made of Al is preferably 50 μm. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3819649-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11378591-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I794676-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112787131-A |
| priorityDate | 2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.