http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016213338-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F3-0446 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F3-041 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F3-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F3-041 |
| filingDate | 2015-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2bf4dc0bedf3103857d6ead429f4644 |
| publicationDate | 2016-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016213338-A |
| titleOfInvention | Developing apparatus, developing method, pattern forming apparatus, and pattern forming method |
| abstract | A developing apparatus and a developing method capable of performing high-accuracy development with suppressed development unevenness and the like and capable of increasing pattern accuracy, and at least high-accuracy cleaning with high-precision development and cleaning unevenness suppressed. Provided are a pattern forming apparatus and a pattern forming method capable of performing accurate development and increasing pattern accuracy. A developing device develops a substrate on which photosensitive layers formed on both sides of a support are exposed in a predetermined pattern. The developing device has a jetting unit that intermittently jets the developer into fine particles on the photosensitive layer on the front surface and the photosensitive layer on the back surface of the substrate held vertically. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021010370-A1 |
| priorityDate | 2015-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 85.