http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016211036-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-08 |
filingDate | 2015-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7b7a73b9027080bc5b4f7aa4b487bcc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcf4340e8e1ff85fa9d0b70f31ac4cc2 |
publicationDate | 2016-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016211036-A |
titleOfInvention | Metal surface treatment liquid, wiring structure, and manufacturing method of wiring structure |
abstract | Provided is a method for extending the pot life of a silane coupling treatment liquid for improving the adhesion between a metal wiring and an insulating layer. A neutral metal surface treatment solution for hydrolyzing a silane coupling aqueous solution containing a silane coupling compound represented by the general formula (1) with ozone. Since the liquidity is neutral rather than the conventional acidity, the resulting hydrolyzate is difficult to dehydrate and condense, and a wiring structure in which the reduction of hydroxyl groups contributing to adhesion is suppressed. (R1 is a C1-3 alkyl group; R2 is an amino group, mercapto group, glycidyl group, glycidoxy group, alicyclic epoxy group, imidazole group, isocyanate group, ureido group, vinyl group, methacryloxy group, acryloxy group, styryl group. Or substituted amino group; m is an integer of 0 to 5; n is an integer of 1 to 2) [Selection] None |
priorityDate | 2015-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.