http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016207971-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c468e687b43595cae7cb1c2667678f1 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31762 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3177 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 |
| filingDate | 2015-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efbd215b95598d1ec83bd2150f73d214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e222fac45e37c36dd817197144fdbf6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dec2ab5fc0f8611ed4720a8a1aa6c65a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92e9f865c73e90a185941a1c3145051c |
| publicationDate | 2016-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016207971-A |
| titleOfInvention | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method |
| abstract | A multi-charged particle beam exposure apparatus that detects a data transfer error, retransmits data when a transfer error occurs, and performs a recovery process as necessary. A blanking plate 204 for switching on / off of each beam of a multi-beam includes a plurality of stages connected in series between a plurality of first buffers connected in series, a first buffer, and a corresponding blanker. A second buffer; and an error detection unit that detects an error in the data stored in the first buffer and the second buffer of each stage, and the blanking control data includes the first buffer and the second buffer. To the corresponding blanker. When an error is detected by the error detection unit, the blanking control data is retransmitted to the blanking plate 204 for the shot in which the error is detected and the shot after the shot order. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018107393-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886103-B2 |
| priorityDate | 2015-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.