| abstract |
There is provided a resist composition capable of producing a resist pattern having a good shape and good crack resistance. A resist composition comprising a resin having an acid labile group, a resin containing a structural unit represented by formula (I), an acid generator and a solvent. [Wherein R i4 2 represents a hydrocarbon group, an acyl group or a hydrogen atom optionally substituted with a hydroxyl group; R i43 represents an alkyl group or an alkoxy group; p represents an integer of 0 to 4; I represents a divalent hydrocarbon group having 3 to 20 carbon atoms including the group represented by Ia), and the methylene group of the group may be replaced with O, S, or a carbonyl group. * Represents a bond with an oxygen atom. ] [Selection figure] None |