http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016191090-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-245 |
| filingDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c2f9b56c836c64dec4cef8d42566539 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c05ec74d3ea8e6147e86c60a7554eb9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_266e7e693d6c3d3e2ddee2e26aec5f01 |
| publicationDate | 2016-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016191090-A |
| titleOfInvention | Sputtering target material, manufacturing method thereof, and optical functional film |
| abstract | Sputtering target is not only capable of forming an optical functional film that has low reflectivity and is ideal for concealing metallic luster and is excellent in reliability by sputtering on a metal thin film. The basic problem is to provide a sputtering target material that is less likely to crack as the material itself. SOLUTION: Fe and Mo are contained as metal elements, and part or all of the metal elements are present in the form of oxides, and the oxide phase contains a Fe-Mo-O-based compound. Sputtering target material characterized by the above. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019137875-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210049815-A |
| priorityDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.