http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016184552-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D201-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_375b82fef29ac4bed7b4a395be036d4a |
| publicationDate | 2016-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016184552-A |
| titleOfInvention | Copper wiring manufacturing method |
| abstract | Provided is a method for producing a copper wiring, which is excellent in etching property of a conductive film and also excellent in adhesion of a formed copper wiring to a substrate. A composition for forming a conductive film containing at least copper oxide nanoparticles, a polyhydric alcohol, and a solvent and having a surface tension of 23 to 50 mN / m and a glass transition temperature of 130 to 190 ° C. , A coating film forming step of forming a coating film by applying on one of a cycloolefin copolymer substrate and a cycloolefin polymer substrate, and a glass transition of the substrate in an atmosphere having an oxygen concentration of 3000 ppm by volume or less Conductive film forming step of forming a conductive film by sintering the coating film within a temperature range of ± 30 ° C., and a wiring pattern for forming a copper wiring by etching the conductive film into a pattern using an etching solution A method for manufacturing a copper wiring, comprising at least a forming step. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019142437-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018074055-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6300213-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7059643-B2 |
| priorityDate | 2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 166.