http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016174022-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B25J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61M5-142 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-23 |
| filingDate | 2015-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e391fbcaea3aa78ac618da0b1b93d8bc |
| publicationDate | 2016-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016174022-A |
| titleOfInvention | Piezoelectric element manufacturing method, piezoelectric element, piezoelectric driving device, robot, and pump |
| abstract | A method of manufacturing a piezoelectric element capable of suppressing peeling of an insulating layer is provided. The method of manufacturing a piezoelectric element according to the present invention includes a step of forming a first electrode layer (S102), a step of forming a piezoelectric layer above the first electrode layer (S104), and the piezoelectric element. A step of forming a second electrode layer above the body layer (S106), a step of patterning the second electrode layer (S110), a step of patterning the piezoelectric layer by wet etching (S112), and patterning. And (S116) forming an organic insulating layer on the side surface of the piezoelectric layer. [Selection] Figure 2 |
| priorityDate | 2015-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 93.