http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016173406-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2015-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4295b078d81a6cca95e6e7f4a2ab9825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec4d23685477830e95fed9ed91b20a1d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_050440a29423592d516e200f9e73e692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa20acd666753d983fcf4210c07713f4 |
| publicationDate | 2016-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016173406-A |
| titleOfInvention | Composition for manufacturing semiconductor device and method for manufacturing processed substrate |
| abstract | An object of the present invention is to provide a composition for manufacturing a semiconductor device and a method for manufacturing a processed substrate capable of forming a metal-containing film that can be removed using an alkaline solution while exhibiting excellent etching resistance. The present invention provides a complex obtained by mixing a metal compound having a hydrolyzable group, a metal-containing compound containing the hydrolyzate or a combination thereof, and at least one organic compound, or this complex. 1st compound which contains what was obtained by hydrolytic condensation, and the said organic compound decomposes | disassembles by the action of the 2nd compound or acid which decomposes | disassembles by the effect | action of an alkali liquid and the solubility with respect to an alkali liquid increases. And a composition for semiconductor device production having a total of 2 to 4 —OH, —COOH, —NCO, —NRARB, or —CORC—. [Selection figure] None |
| priorityDate | 2015-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 285.