http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016171182-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2102ae92d209c2f12af9cc2e6c61b2f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2755c806997dfe83a65d0368c30fda8f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F299-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30 |
| filingDate | 2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f289d8313171e3c703bec4fd5384ec27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc33a2ef987dbf2aa448d98ec6e8cc6a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40df580c629691ba252098983b17033b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_152d744e1115729339f19b180c15b19b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ece4df8c593aa1af6cf36ebeee1c484c |
| publicationDate | 2016-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016171182-A |
| titleOfInvention | Imprint mold, method for producing the same, and method for producing fine structure |
| abstract | An imprint mold exhibiting excellent releasability with respect to a resist material, a method for manufacturing the same, and a method for manufacturing a fine structure are provided. A surface layer 1 having a fine pattern 2 on a surface 1a and a support layer 5 supporting a back surface 1b of the surface layer 1, wherein the surface layer 1 is a linear alkyl group having at least 16 carbon atoms. A side chain crystalline polymer obtained by polymerizing a (meth) acrylate having a UV curable side chain crystalline polymer obtained by reacting a compound having an ultraviolet curable functional group, and the side chain An imprint mold 10 and a method for producing the same, in which a crystalline polymer is made of a copolymer obtained by further polymerizing a reactive fluorine compound. This is a method for manufacturing a microstructure using a mold 10. [Selection] Figure 1 |
| priorityDate | 2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.