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filingDate 2016-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2016-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2016166883-A
titleOfInvention Surface acoustic wave sensor
abstract A surface acoustic wave sensor capable of suitably suppressing the flow of a sample liquid onto an IDT electrode is provided. A SAW sensor (1) includes a piezoelectric substrate (23), first IDT electrodes (45) positioned on an upper surface of the piezoelectric substrate (23) and spaced apart from each other with a detection unit (detection region (23a)) on the piezoelectric substrate (23) interposed therebetween. The 2IDT electrode 47, the protective film 53 covering the first IDT electrode 45 and the second IDT electrode 47, the first IDT electrode 45, the second IDT electrode 47 and the detection unit are covered with a space 29 above them. And a cover 25. On the lower surface of the cover 25, the detection unit facing surface 25 b (the lower surface of the film 35) facing at least a part of the detection unit is a pair of electrode facing surfaces 25 a (cover body 33) facing the first IDT electrode 45 and the second IDT electrode 47. The contact angle with the specimen is smaller than that of the lower surface. [Selection] Figure 6
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