http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016157886-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_915269922949d81a90260e5cd5d2df40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 |
| filingDate | 2015-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07519b2e1eb819215d741305ef640e2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abfee3ee0e98e20b26119afaabe336a1 |
| publicationDate | 2016-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016157886-A |
| titleOfInvention | Metal vapor supply apparatus, metal / metal compound production apparatus, GaN single crystal production method, and nanoparticle production method |
| abstract | Provided are a metal vapor supply apparatus capable of generating metal vapor at a high supply rate, a metal / metal compound production apparatus using the same, a GaN single crystal production method, and a nanoparticle production method. To do. A metal vapor supply apparatus includes a crucible for holding molten metal and an evaporator for promoting generation of metal vapor, the evaporator being partly in contact with the molten metal. It is installed in the crucible so as to be possible. The metal / compound manufacturing apparatus deposits the metal or a compound thereof on a surface, a metal vapor supply apparatus, a reaction gas supply apparatus for supplying a reaction gas to the metal vapor supplied from the metal vapor supply apparatus And a susceptor portion for holding the substrate. The metal / compound production apparatus can be used for production of GaN single crystals and production of nanoparticles. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7087762-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019001671-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020011866-A |
| priorityDate | 2015-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.