| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c97f90ab12b35b650d5fd039ed7a41a5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2252-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B25-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 |
| filingDate |
2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc15d94dc830f0fd50d87d13a93cb8eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd44ef27bbf10aa1be769f83f95aa4ed |
| publicationDate |
2016-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016145649-A |
| titleOfInvention |
Drying apparatus and drying method |
| abstract |
[PROBLEMS] To improve the uniformity of drying. A drying apparatus 1A faces a coating film on a substrate f1 to be transferred, condenses a solvent vapor from the coating film, and condenses a drying plate 11, and a condensing plate 11 via the substrate f1. And one or a plurality of heating devices 12 that are disposed at opposing positions and heat the substrate f1. 1 A of drying apparatuses heat with the heating apparatus 12 so that the temperature of the coating film on the board | substrate f1 may rise in steps. The one or more heating devices 12 are arranged to be inclined with respect to the substrate surface so that the distance from the substrate f1 is gradually reduced in the transport direction y of the substrate f1. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114367414-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114367414-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102415177-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180042808-A |
| priorityDate |
2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |