http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016143651-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-22 |
| filingDate | 2015-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b67da8eb6ca5c0eb6e6d3993242e0988 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c89059aadb7f972db8acb81e45567d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcc597d334c6684f2b13f43a7e941be7 |
| publicationDate | 2016-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016143651-A |
| titleOfInvention | Inspection apparatus and inspection method |
| abstract | PROBLEM TO BE SOLVED: To provide a new inspection apparatus for inspecting the surface roughness of an inspection object. An inspection system includes an electron source that generates an electron beam, a primary electron optical system that guides the electron beam generated from the electron source to a sample, and mirror electrons generated from the sample on a detection surface. The imaging device 104 that receives and detects, the secondary electron optical system 105 that guides mirror electrons generated from the sample to the imaging surface of the imaging device 104, and the half-value width in a predetermined direction of the distribution of mirror electrons imaged by the imaging device 104 And an inspection processing unit 107 for obtaining the surface roughness of the sample using the calibration information. [Selection] FIG. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200097788-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102500123-B1 |
| priorityDate | 2015-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.