http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016138951-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73e224665ceb7b15f8e66dfd0ee245c6 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
filingDate | 2015-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d780d07347605c4f125e9afebb97934b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ae1895af798be19754e616f59e7163c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28c885dbb7d12af050d9219ff66e3ba0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb750dee249618ea7d00e7f945a427e1 |
publicationDate | 2016-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016138951-A |
titleOfInvention | Resist stripper and method for producing the same |
abstract | A hard-baked resist film is more than necessary for polymerization of a novolac resin and a DNQ compound, and is firmly fixed to a metal film as a base. For this reason, there are cases in which a hard-baked resist film cannot be peeled off with a common resist stripping solution that can peel off the resist film on the Cu film, Cu / Mo film, and Al film. A resist stripping solution comprising a cyclic amine, a polar solvent, water, and an anticorrosive agent, wherein each component is allowed to elapse for 24 hours or more, particularly pyrrolidine or pyrrolidine as a cyclic amine. There is provided a resist stripping solution using at least one of the compounds having a substituent bonded to the 3-position of and a reducing starch syrup or a mixture of sugar alcohol and polyethylene glycol as an anticorrosive. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017069273-A |
priorityDate | 2015-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 99.