| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-319 |
| filingDate |
2015-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1da4cdc3b3dd7055bdaa0fca879c7021 |
| publicationDate |
2016-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016134447-A |
| titleOfInvention |
Piezoelectric element and manufacturing method thereof, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus |
| abstract |
A piezoelectric element capable of manufacturing a first electrode oriented in a (110) plane at a low cost is provided. A first electrode 60 formed on a substrate 10 via an orientation control layer 57, a piezoelectric layer 70 formed on the first electrode 60, and a second electrode 80 formed on the piezoelectric layer 70, The orientation control layer 57 is made of a complex oxide having a perovskite structure preferentially oriented in the (100) plane, and the first electrode 60 is preferentially oriented in the (110) plane. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110462860-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110462860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11696506-B2 |
| priorityDate |
2015-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |