http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016130337-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 |
| filingDate | 2015-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcefe1bb4a1c71461d704d1691e43483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33e089881ea9874599e16fe6c4fd9656 |
| publicationDate | 2016-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016130337-A |
| titleOfInvention | Method for producing metal or semi-metal carbonitride film |
| abstract | An object of the present invention is to provide a method for producing a metal or semi-metal carbonitride film using an N-trialkylsilyl-1,2,3-triazole compound as a carbonitriding agent. The object of the present invention is solved by a method for producing a metal or semi-metal carbonitride film characterized by using an N-trialkylsilyl-1,2,3-triazole compound as a nitrogen supply source. . [Selection] Figure 1 |
| priorityDate | 2015-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 151.