http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016122090-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K11-7734 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64 |
| filingDate | 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e9fd23ba9dfbba2d6356348102fddf5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0859f3251843cdbeafd0c543455e4551 |
| publicationDate | 2016-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016122090-A |
| titleOfInvention | Pellicle adhesive, pellicle using the same, and evaluation method for pellicle |
| abstract | Provided are a pellicle pressure-sensitive adhesive capable of easily and accurately evaluating unevenness and waviness of a pressure-sensitive adhesive applied to a pellicle frame, a pellicle using the same, and a method for evaluating the pellicle. A pellicle pressure-sensitive adhesive for attaching a pellicle to a photomask, wherein a release layer (separator) 14 for protecting the pressure-sensitive adhesive layer 13 can be peeled off at the lower end surface of the pressure-sensitive adhesive layer 13 It is pasted. The pressure-sensitive adhesive layer 13 is a pressure-sensitive adhesive containing a stress-stimulated luminescent material. When the pellicle frame is attached to the photomask with the pressure-sensitive adhesive layer 13, the pressure-sensitive adhesive coating thickness is not uniform and is partially convex. If there is a protruding portion, a relatively greater stress is applied than that of the flat portion, so that the stress-stimulated luminescent material added to the adhesive 13 emits light strongly. [Selection] Figure 1 |
| priorityDate | 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.