http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016117711-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-753 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-16 |
filingDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f245ddfecb97f7771c44d356e4580e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
publicationDate | 2016-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2016117711-A |
titleOfInvention | Compound, resin, resist composition, and method for producing resist pattern |
abstract | Provided are a compound, a resin, and a resist composition used for a resist that can form a resist pattern with a good shape with few defects. A compound represented by formula (I). [R 1 is a halogen-substituted / unsubstituted C 1-6 alkyl group, or a halogen atom; A 1 is a single bond or * —A 2 —CO—O—; * is a bond to an oxygen atom; A 2 alkanediyl groups Cl to 6; W 1 is a divalent alicyclic hydrocarbon group C4~18 substituted / unsubstituted; W 2 comprises a monovalent alicyclic hydrocarbon group C4~18 A hydrocarbon group; —CH 2 — in the alicyclic hydrocarbon group of W 1 and W 2 may be replaced by —O— or —CO—; W 1 is preferably a substituted / unsubstituted adamantanediyl] [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7067117-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018145420-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016206459-A |
priorityDate | 2014-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 277.