| abstract |
An imprint apparatus advantageous in terms of economy is provided. An imprint apparatus for forming a pattern on the substrate by performing a mold pressing on the imprint material on the substrate, a supply unit for supplying a gas between the imprint material and the mold, A control unit that controls the supply unit so that the first gas is supplied to perform the pressing, and the second gas is supplied to perform processing different from the pressing. [Selection] Figure 2 |