http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016092045-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c97f90ab12b35b650d5fd039ed7a41a5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2014-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e343bf737a22391d018cf6632a848a72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97af2c2d86acbaee1a9b724630acc706 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb5fa5e8b9addc18d99141a7bbb48d99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a543aa64541674bfb1e128463be94baa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7738e9f95606fa61afa4639102533c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cbad2c95602cc641c1f1bfce9bc795d |
| publicationDate | 2016-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016092045-A |
| titleOfInvention | Abrasive material, abrasive slurry and polishing method |
| abstract | An object of the present invention is to provide an abrasive containing abrasive particles having excellent durability. Another object is to provide an abrasive slurry containing the abrasive particles and a polishing method using the abrasive. The abrasive of the present invention is an abrasive comprising at least abrasive particles 10 containing cerium oxide, and the abrasive particles have a core-shell structure comprising at least a core 1A and a shell 2A. The cerium contained in the shell is 60% by mass or more of the shell, the core contains the rare earth element carbonate 3A, and the difference in the content of cerium contained in the core and the shell is 15% by mass or more, wherein the abrasive particles exhibit absorption derived from carbonic acid by infrared spectroscopy, and the absorbance of the absorption is in the range of 0.2 to 0.6. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019207926-A1 |
| priorityDate | 2014-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 92.