http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016081753-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7675dd81bcae10d633a4ec7534840ee7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-083 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate | 2014-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8fa4976a3447142177a4351a4ceb716 |
| publicationDate | 2016-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016081753-A |
| titleOfInvention | Beam extraction slit structure and ion source |
| abstract | A beam extraction slit structure and an ion source useful for improving the productivity of an ion implantation apparatus are provided. A beam extraction slit structure includes a plasma chamber inner surface in contact with plasma in use, a plasma chamber outer surface facing the extraction electrode, and a plasma chamber inner surface and a plasma chamber outer surface in the beam extraction direction. And a slit surface portion 68 for forming a beam extraction slit 42 between them. The slit surface portion 68 includes a plasma interface fixing portion 69 that holds the plasma plasma interface in a fixed manner, and a plasma interface non-fixed portion 70 that holds the plasma plasma interface so as to be movable in the beam extraction direction. The plasma interface fixing portion 69 is formed in a high density region of plasma in the slit longitudinal direction. The plasma interface non-fixed portion 70 is formed in a low density region of plasma in the slit longitudinal direction. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021257224-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7194053-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019200975-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I795794-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361935-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020155216-A |
| priorityDate | 2014-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.