http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016080514-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d953edb85044c2cef2c3ab464473c434 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2014-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ec5b29312caaa7a21dc6f8e44662784 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d164425576dda0dcc37b64b029ac839a |
| publicationDate | 2016-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016080514-A |
| titleOfInvention | Contact probe |
| abstract | A contact probe having a structure capable of withstanding repeated measurement while preventing stress concentration. An insulating layer having elasticity is provided on one surface of a hard substrate. The insulating layer 20 has a first hole 21 at the center. Each wiring 30 is partially provided on the insulating layer 20, the tip side protrudes into the first hole 21 of the insulating layer 20, and has a convex portion 31 that serves as a contact portion with the electrode of the inspection object on the tip side. . Each wiring 30 has a cantilever structure having the conductive connection portion 22 as a fulcrum of vertical displacement. As the wiring 30 is displaced up and down, the insulating layer 20 having elasticity is elastically deformed and compressed by the wiring 30. [Selection] Figure 1 |
| priorityDate | 2014-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 15.