| abstract |
PROBLEM TO BE SOLVED: To provide an organic solvent suitable for cleaning a polydimethylsiloxane mold for imprint. A method for cleaning an imprint mold comprising a silicone-based resin such as polydimethylsiloxane, wherein the imprint mold is immersed in an organic solvent at a temperature of 23 ° C. for 5 minutes. In this method, the imprint mold is washed using an organic solvent in which the swelling ratio of the imprint mold is 10 to 30%. The specific organic solvent is preferably at least one ketone solvent selected from the group consisting of acetone, methyl ethyl ketone, methyl isobutyl ketone and cyclohexanone. [Selection figure] None |