| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e71293e8c653f99fb08d7739f2f425f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B8-4494
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0607
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0644
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-043 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate |
2014-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82475467f0dafdad40b8b357553d5917
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5769350fdcbcbf3e2c5e5b97c4c80a0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35cb536f8c16cc48ef3d5883b045e3a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50dc78504820ddb53e8b346a7dca4015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_762e0378ead8375d1c5661dc1748dc8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51008cdf79578aae8379f998a6bd4945 |
| publicationDate |
2016-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016072661-A |
| titleOfInvention |
Ultrasonic transducer, manufacturing method thereof, ultrasonic transducer array and ultrasonic inspection apparatus |
| abstract |
The present invention provides a structure capable of suppressing warpage of a substrate on which a CMUT is formed and a method for manufacturing the same without affecting the film configuration optimized to maintain the characteristics of the CMUT and suppress distortion of the membrane. A substrate warpage prevention structure is provided in a region or position other than the membrane that determines the characteristics of the CMUT. As a warpage prevention structure, for example, in a CMUT having a structure in which a first conductive layer and a second conductive layer are provided on a substrate with a cavity interposed therebetween, warpage of the substrate is prevented between the substrate and the first conductive film. A warping prevention layer is provided. When the insulating film disposed between the cavity and the first conductive film and between the cavity and the second conductive film is a silicon oxide film, the warpage preventing layer includes a silicon nitride film. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I757690-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018061395-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018056734-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018037730-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020136532-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108886660-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220148690-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102575738-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018106048-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108886660-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11268937-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200102347-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11305986-B2 |
| priorityDate |
2014-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |