http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016068219-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-10 |
| filingDate | 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54ebe39ed2f4ee63e1f667f8d4f50090 |
| publicationDate | 2016-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2016068219-A |
| titleOfInvention | Substrate polishing apparatus and substrate polishing method |
| abstract | PROBLEM TO BE SOLVED: To provide a substrate polishing apparatus that is advantageous in improving polishing efficiency and saving space. A substrate polishing apparatus includes a substrate holder that holds a substrate and a polishing pad holder that holds a polishing pad, and the substrate is brought into contact with the polishing pad by contacting the substrate with the polishing pad. Polish with P. The substrate holder 10 includes a ring gear 12 having inner teeth 121 on the inner periphery, a pinion gear 13 provided inside the ring gear 12 and having outer teeth 131 that mesh with the inner teeth 121 of the ring gear 12, and the pinion gear 13. The ring gear 12 is revolved while maintaining the meshing of the ring gear 12 and the pinion gear 13 with the center axis O2 of the shaft as the center of revolution, and the camshaft 14 that rotates the ring gear 12 thereby is fixed to the ring gear 12. And a substrate holding member 11 for holding the substrate S. [Selection] Figure 1 |
| priorityDate | 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.