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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_457385e3b1b64b2a4caf0d1936321e48
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publicationDate 2016-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2016066095-A
titleOfInvention Compositions containing base-reactive components and methods for photolithography
abstract A novel photoresist composition with reduced blob defects useful in immersion lithography is provided. One or more materials comprising one or more resins, a photoactive component, and (A) one or more base-reactive groups and (B) one or more polar groups different from the base-reactive groups. A photoresist composition comprising. [Selection figure] None
priorityDate 2010-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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