| abstract |
An object of the present invention is to provide a membrane bonded structure in which an unfired body is fixed to a ceramic substrate without cracks at a stage before firing, and the film thickness finally obtained is constant. A method for producing a membrane bonded structure includes a step of preparing a ceramic substrate and a slurry containing an organic solvent as a raw material powder, an auxiliary agent, a gelling agent and a dispersion medium in a mold. A step b for producing a green body by forming and solidifying a slurry by a polymerization reaction, a step c for obtaining a green structure by drying after inserting a ceramic substrate into a recess or a through hole of the green body, And a step d of firing the green structure. In step c, when the amount of clearance when the ceramic substrate is inserted into the green body is x [μm] and the volume ratio of the dispersion medium in the slurry is y [vol%] before drying, 0 ≦ x ≦ 250, y ≧ 0.067x + 30, y ≦ 0.1x + 60, x and y are set so as to satisfy y ≦ 70. [Selection] Figure 3 |