| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 |
| filingDate |
2015-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf628573aaf55a49a46fe0f0f9df0786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09dbf6f911d48fcda7858c4259ad8fca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ed0f46c6c657e35f329b5d4eef40b46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db8549fc8792a9dd3f575c602d70a1b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd3b4a461ad1562a9a242dfd2a1ec918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a962152204cbf9c7b8ea1c9ef6e1a9ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c80d68463d46aeafcbccacc14ac1f4e8 |
| publicationDate |
2016-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2016054155-A |
| titleOfInvention |
Environmental cell for charged particle beam systems |
| abstract |
An environmental cell for a charged particle beam system is provided. An environmental cell for a charged particle beam system enables relative motion between a cell mounted on an XY stage and the optical axis of a focusing column, thereby placing a substage within the cell. Eliminate the need to do. Flexible cell configurations such as retractable lids allow a variety of processes including beam induced processes and thermally induced processes. Photon yield spectroscopy performed using gas cascade amplification of photoelectrons in a charged particle beam system allows for analysis of materials in the cell and monitoring of processing in the cell. Luminescence analysis can also be performed using a retractable mirror. [Selection] Figure 4 |
| priorityDate |
2010-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |